Growth of lithium hydride thin films from solutions: Towards solution atomic layer deposition of lithiated films

• Ivan Kundrata,
• Karol Fröhlich,
• Lubomír Vančo,
• Matej Mičušík and
• Julien Bachmann

Beilstein J. Nanotechnol. 2019, 10, 1443–1451, doi:10.3762/bjnano.10.142

• , Dúbravská cesta 9, 845 41 Bratislava, Slovakia Saint Petersburg State University, Institute of Chemistry, Universitetskii pr. 26, 198504 St. Petersburg, Russia 10.3762/bjnano.10.142 Abstract Lithiated thin films are necessary for the fabrication of novel solid-state batteries, including the electrodes and

• precursors and at temperatures not suitable for conventional ALD. Keywords: lithiated thin films; lithium hydride; solution atomic layer deposition (sALD); Introduction While the development of electric motors and semiconductor devices is progressing, the pressure on battery development is increasing